


| Parameter | Value |
| Maximum load weight: | 10kg |
| Load dimensions: | 200*200*200mm |
| Inclination rotation accuracy: | ± 10" |
| Three-axis verticality: | ± 10" |
| Table surface flatness: | 0.03mm |
| Three-axis intersection: | within Φ0.5mm ball |
| Three-axis angular position positioning accuracy: | ± 8" |