| Technical parameter | |
| Rated load: | 10.5kg |
| Three-axis rotation angle range: | 360° continuous rotation; |
| Load size: | ⌀200×200×200mm |
| Table surface flatness: | ≤0.02mm |
| Table surface leakage magnetic field: | ≤1mT (10mm from the table surface) |
| Inclination rotation accuracy: | Inner frame: ≤±5"; |
| Middle frame: ≤±5"; | |
| Outer frame: ≤±5" | |
| Axis verticality: | Inner and middle frames: ≤±5"; |
| Outer and middle frames: ≤±5" | |
| Angular position accuracy: | Inner frame: ≤±10"; |
| Middle frame: ≤±10"; | |
| Outer frame: ≤±10" | |
| Angular position repeatability: | Inner frame: ≤±4"; |
| Middle frame: ≤±4"; | |
| Outer frame: ≤±4" | |
| Angular position resolution | 3.6" |
| Minimum rate of three axes | 0.01°/s; |
| Rotation speed: | Inner frame: 450°/s; |
| Middle frame: 250°/s; | |
| Outer frame: 150°/s | |
| Maximum angular acceleration: | Inner frame: 1150°/s²; |
| Middle frame: 750°/s²; | |
| Outer frame: 550°/s² | |
| Rate accuracy and stability: | 5e-003 (1° average); |
| 5e-004 (10° average); | |
| 5e-005 (360° average) | |
| Working bandwidth: | Inner frame: 12Hz; |
| Middle frame: 8Hz; | |
| Outer frame: 5Hz | |
| Amplitude error: | -3db |
| Angular position control accuracy: | ±12" |
