| Parameter | Specification |
| Rated Load | 10.5 kg |
| Three-Axis Rotation Angle Range | 360° continuous rotation |
| Load Size | ≤ 200 × 200 × 200 mm |
| Table Surface Flatness | ≤ 0.02 mm |
| Table Surface Leakage Magnetic Field | ≤ 1 mT (10 mm from the table surface) |
| Inclination Rotation Accuracy | Inner frame: ≤ ±5″ |
| Middle frame: ≤ ±5″ | |
| Outer frame: ≤ ±5″ | |
| Axis Verticality | Inner and middle frames: ≤ ±5″ |
| Outer and middle frames: ≤ ±5″ | |
| Angular Position Accuracy | Inner frame: ≤ ±10″ |
| Middle frame: ≤ ±10″ | |
| Outer frame: ≤ ±10″ | |
| Angular Position Repeatability | Inner frame: ≤ ±4″ |
| Middle frame: ≤ ±4″ | |
| Outer frame: ≤ ±4″ | |
| Angular Position Resolution | 3″ |
| Minimum Rate of Three Axes | 0.01°/s |
| Rotation Speed | Inner frame: 450°/s |
| Middle frame: 250°/s | |
| Outer frame: 150°/s | |
| Maximum Angular Acceleration | Inner frame: 1150°/s² |
| Middle frame: 750°/s² | |
| Outer frame: 550°/s² | |
| Rate Accuracy and Stability | 5e-003 (1° average) |
| 5e-004 (10° average) | |
| 5e-005 (360° average) | |
| Working Bandwidth | Inner frame: 12 Hz |
| Middle frame: 8 Hz | |
| Outer frame: 5 Hz | |
| Amplitude Error | -3 dB |
| Angular Position Control Accuracy | ±12″ |
