






| Parameter | Value / description |
|---|---|
| Maximum load weight | 10 kg |
| Maximum load size | ϕ 180 mm × 200 mm |
| Load mounting table | ϕ 320 mm, super‑hard aluminium alloy |
| Three‑axis angular positioning accuracy | ≤ ±10 arcsec (±10″) |
| Three‑axis angular position repeatability | ≤ ±5 arcsec (±5″) |
| Three‑axis rotation range | Inner: 360° continuous Middle: ±100° (0° when table facing up) Outer: 0° – 360° (0° … 360°) |
| Equipment weight | ≈ 120 kg |
| Maximum angular rate | Inner: ±10 000 °/s Middle: ±400 °/s Outer: ±300 °/s Three‑axis linkage: ±100 °/s |
| Maximum angular acceleration | Inner: 10 000 °/s² Middle: 200 °/s² Outer: 100 °/s² |
| Rate accuracy & rate stability(ω = angular rate) |
ω < 1 °/s : 5×10⁻³ (1° average)
1 ° ≤ ω < 10 °/s : 5×10⁻⁴ (10° average)
ω ≥ 10 °/s : 5×10⁻⁵ (360° average)
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